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橢偏儀是一種利用偏振態(tài)的變化 后光束探測(cè)樣品反應(yīng)技術(shù)。不像反射儀，橢偏儀參數(shù)（PSI和Del）是在非正常的入射角得到。改變?nèi)肷浣恰？梢缘玫礁嗟臄?shù)據(jù)集，這將有助于精煉模型，減少不確定性和提高用戶的數(shù)據(jù)信心。因此，可變角度橢偏儀比固定角度的橢偏儀系統(tǒng)具有更強(qiáng)大的功能 。目前有兩種方法改變?nèi)肷浣牵謩?dòng)或自動(dòng)模式。

Ansgtrom Sun公司設(shè)計(jì)角度調(diào)整模型，通過(guò)5度間隔后精確預(yù)置槽移動(dòng)手臂手動(dòng)調(diào)節(jié)角度和電動(dòng)精密測(cè)角0.01度分辨率兩種模型。此外，測(cè)角垂直布局設(shè)計(jì)，樣品可以水平放置，這是更安全的處理樣品時(shí)。可靠的和足夠的原始數(shù)據(jù)集，更多膜的性能參數(shù)，如薄膜或涂層 厚度，光學(xué)常數(shù)（折射率n，消光系數(shù)k指數(shù)）、接口、孔隙度甚至成分可以通過(guò)建模。在這個(gè)意義上，先進(jìn)的軟件是一個(gè)必須為高性能光譜橢偏儀（SE）工具。我們開發(fā)了TFprobe 3 x版軟件的系統(tǒng)設(shè)置。仿真，測(cè)量，分析，數(shù)據(jù)管理和2D / 3D圖形演示的一體機(jī)。 此外，SE200工具覆蓋了很寬的波長(zhǎng)范圍內(nèi)，從深紫外線（DUV）在可見光到近紅外（250～1100nm），標(biāo)準(zhǔn)配置。DUV范圍適合衡量超薄膜，如納米厚度范圍。一個(gè)例子是在硅晶片上的原生氧化層，這是典型的2nm厚的**。深紫外光譜橢偏儀也是必不可少的，用戶需要測(cè)量多種材料的帶隙。

客戶留言：

“I want to thank Dr. Sun and his team at Angstrom Sun Technologies for all of their help with the purchasing of our Spectroscopic Ellipsometer. Dr. Sun and his team took the time to talk with us about our needs and what would best suit them. After we placed the order we experienced an exceptionally quick shipping timeframe (on site two weeks later). Once we received the well packaged ellipsometer， and with the help of one other person we were able to unbox and set up the ellipsometer. Following their well documented instructions， we had the ellipsometer ready to run. Dr. Sun answered our remaining questions and we were able to start taking measurements on our own. After we had worked with the program more， anytime a question would arise， Dr. Sun and his team’s prompt replies kept us working in the right direction into full functionality. Support included helping with the uploading of our own NK table as well as help with the modeling. Thank you Dr. Sun for taking the time to help us better understand Ellipsometry and for putting out an exceptional product”來(lái)自美國(guó)科羅拉多的 Benjamin Sheppard

SE系列型號(hào)：

Spectroscopic Ellipsometer SE200BA-M300

Spectroscopic Ellipsometer SE200BA-MSP

Spectroscopic Ellipsometer SE200BM-M300

Spectroscopic Ellipsometer SE200BM-M450

Spectroscopic Ellipsometer SE200BM-Solar

Spectroscopic Ellipsometer SE300BM

Spectroscopic Ellipsometer SE500BA